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dc.date.accessioned2020-03-26T10:36:02Z
dc.date.available2020-03-26T10:36:02Z
dc.identifier.urihttp://library.oapen.org/handle/20.500.12657/20963
dc.typegrantor
grantor.nameUniversity of Science and Technology of China Center for Micro- and Nanoscale Research and Fabrication
grantor.acronymCenter for Micro- and Nanoscale Research and Fabrication, USTC
grantor.acronymUSTC Center of Micro and Nanoscale Research and Fabrication
grantor.acronymUSTC Center for Micro- and Nanoscale Research and Fabrication
grantor.acronym中国科学技术大学微纳研究与制造中心
grantor.doi10.13039/501100012333


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