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dc.contributor.authorTaudt, Christopher
dc.date.accessioned2021-12-13T18:55:18Z
dc.date.available2021-12-13T18:55:18Z
dc.date.issued2022
dc.identifierONIX_20211213_9783658359263_14
dc.identifier.urihttps://library.oapen.org/handle/20.500.12657/51931
dc.description.abstractThis Open Access book discusses an extension to low-coherence interferometry by dispersion-encoding. The approach is theoretically designed and implemented for applications such as surface profilometry, polymeric cross-linking estimation and the determination of thin-film layer thicknesses. During a characterization, it was shown that an axial measurement range of 79.91 µm with an axial resolution of 0.1 nm is achievable. Simultaneously, profiles of up to 1.5 mm in length were obtained in a scan-free manner. This marked a significant improvement in relation to the state-of-the-art in terms of dynamic range. Also, the axial and lateral measurement range were decoupled partially while functional parameters such as surface roughness were estimated. The characterization of the degree of polymeric cross-linking was performed as a function of the refractive index. It was acquired in a spatially-resolved manner with a resolution of 3.36 x 10-5. This was achieved by the development of a novel mathematical analysis approach.
dc.languageEnglish
dc.subject.classificationbic Book Industry Communication::P Mathematics & science::PH Physics::PHJ Optical physics
dc.subject.classificationbic Book Industry Communication::P Mathematics & science::PD Science: general issues::PDD Scientific standards::PDDM Mensuration & systems of measurement
dc.subject.othersurface metrology
dc.subject.otherprofilometry
dc.subject.otherinterferometry
dc.subject.otherlow-coherence interferometry
dc.subject.othersemiconductor manufacturing
dc.subject.otheroptical metrology
dc.subject.otherOpen Access
dc.titleDevelopment and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry
dc.typebook
oapen.identifier.doi10.1007/978-3-658-35926-3
oapen.relation.isPublishedBy6c6992af-b843-4f46-859c-f6e9998e40d5
oapen.relation.isFundedBy920b9b3b-c6db-4103-995b-d5f9c918d5d2
oapen.relation.isFundedBy29964b97-7084-4a33-8a04-1d460fcd4895
oapen.relation.isbn9783658359263
oapen.imprintSpringer Vieweg
oapen.pages163
oapen.place.publicationBern
oapen.grant.number[grantnumber unknown]
oapen.grant.number[grantnumber unknown]


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