Retroreflex Ellipsometry for Nonplanar Surfaces

Abstract

Retroreflex ellipsometry addresses the geometric restrictions of conventional ellipsometry by using a retroreflective sheet, which returns the light beam from the sample on the same beam path. Simulation and experiments of retroreflex ellipsometry in two- and three-phase systems have been demonstrated based on the proposed concepts, which have shown the capabilities of ellipsometric measurements on nonplanar surfaces.