Show simple item record

Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis

dc.contributor.authorKopf, Marlene
dc.date.accessioned2022-04-04T14:53:17Z
dc.date.available2022-04-04T14:53:17Z
dc.date.issued2022
dc.identifierONIX_20220404_9783731511212_6
dc.identifier.issn1869-5183
dc.identifier.urihttps://library.oapen.org/handle/20.500.12657/53694
dc.languageGerman
dc.relation.ispartofseriesSchriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie
dc.subject.classificationthema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materialsen_US
dc.subject.otherMEMS-Sensor
dc.subject.otherDrehratensensor
dc.subject.otherInertialsensor
dc.subject.otherDämpfung
dc.subject.otherQ-Faktor
dc.subject.otherMEMS sensor
dc.subject.othergyroscope
dc.subject.otherinertial sensor
dc.subject.otherdamping atmosphere
dc.subject.otherQ factor
dc.titleLangzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis
dc.typebook
oapen.abstract.otherlanguageDue to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of gyroscopes are investigated and countermeasures are presented. A focus is placed on desorption sources as well as gas diffusion paths in the sensor layer stack.
oapen.identifier.doi10.5445/KSP/1000136062
oapen.relation.isPublishedBy44e29711-8d53-496b-85cc-3d10c9469be9
oapen.relation.isbn9783731511212
oapen.imprintKIT Scientific Publishing
oapen.series.number42
oapen.pages220
oapen.place.publicationKarlsruhe


Files in this item

Thumbnail
Name:
9783731511212.pdf
Size:
54.65Mb
Format:
PDF
ISBN:
9783731511212
License:
http://creativecommons.org/lic ...
Webshop link:
https://doi.org/10.5445/KSP/10 ...
View/Open

This item appears in the following Collection(s)

Show simple item record