Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis
| dc.contributor.author | Kopf, Marlene | |
| dc.date.accessioned | 2022-04-04T14:53:17Z | |
| dc.date.available | 2022-04-04T14:53:17Z | |
| dc.date.issued | 2022 | |
| dc.identifier | ONIX_20220404_9783731511212_6 | |
| dc.identifier.issn | 1869-5183 | |
| dc.identifier.uri | https://library.oapen.org/handle/20.500.12657/53694 | |
| dc.language | German | |
| dc.relation.ispartofseries | Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie | |
| dc.subject.classification | thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials | en_US |
| dc.subject.other | MEMS-Sensor | |
| dc.subject.other | Drehratensensor | |
| dc.subject.other | Inertialsensor | |
| dc.subject.other | Dämpfung | |
| dc.subject.other | Q-Faktor | |
| dc.subject.other | MEMS sensor | |
| dc.subject.other | gyroscope | |
| dc.subject.other | inertial sensor | |
| dc.subject.other | damping atmosphere | |
| dc.subject.other | Q factor | |
| dc.title | Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis | |
| dc.type | book | |
| oapen.abstract.otherlanguage | Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of gyroscopes are investigated and countermeasures are presented. A focus is placed on desorption sources as well as gas diffusion paths in the sensor layer stack. | |
| oapen.identifier.doi | 10.5445/KSP/1000136062 | |
| oapen.relation.isPublishedBy | 44e29711-8d53-496b-85cc-3d10c9469be9 | |
| oapen.relation.isbn | 9783731511212 | |
| oapen.imprint | KIT Scientific Publishing | |
| oapen.series.number | 42 | |
| oapen.pages | 220 | |
| oapen.place.publication | Karlsruhe | |
| peerreview.anonymity | All identities known | |
| peerreview.id | 51a542ec-eaeb-47c2-861d-6022e981a97a | |
| peerreview.open.review | No | |
| peerreview.publish.responsibility | Books or series editor | |
| peerreview.review.stage | Pre-publication | |
| peerreview.review.type | Full text | |
| peerreview.reviewer.type | Editorial board member | |
| peerreview.reviewer.type | External peer reviewer | |
| peerreview.title | Dissertations in Series (Dissertationen in Schriftenreihe) |
