Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis
Abstract
Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of gyroscopes are investigated and countermeasures are presented. A focus is placed on desorption sources as well as gas diffusion paths in the sensor layer stack.
Keywords
MEMS-Sensor; Drehratensensor; Inertialsensor; Dämpfung; Q-Faktor; MEMS sensor; gyroscope; inertial sensor; damping atmosphere; Q factorDOI
10.5445/KSP/1000136062ISBN
9783731511212, 9783731511212Publisher
KIT Scientific PublishingPublisher website
https://www.ksp.kit.edu/index.php?link=shop&sort=allPublication date and place
Karlsruhe, 2022Imprint
KIT Scientific PublishingSeries
Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie, 42Classification
Mechanical engineering and materials