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    Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis

    Dissertations in Series (Dissertationen in Schriftenreihe)

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    Author(s)
    Kopf, Marlene
    Collection
    AG Universitätsverlage
    Language
    German
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    Abstract
    Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of gyroscopes are investigated and countermeasures are presented. A focus is placed on desorption sources as well as gas diffusion paths in the sensor layer stack.
    URI
    https://library.oapen.org/handle/20.500.12657/53694
    Keywords
    MEMS-Sensor; Drehratensensor; Inertialsensor; Dämpfung; Q-Faktor; MEMS sensor; gyroscope; inertial sensor; damping atmosphere; Q factor
    DOI
    10.5445/KSP/1000136062
    ISBN
    9783731511212, 9783731511212
    Publisher
    KIT Scientific Publishing
    Publisher website
    https://www.ksp.kit.edu/index.php?link=shop&sort=all
    Publication date and place
    Karlsruhe, 2022
    Imprint
    KIT Scientific Publishing
    Series
    Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie, 42
    Classification
    Mechanical engineering and materials
    Pages
    220
    Rights
    http://creativecommons.org/licenses/by-sa/4.0
    • Imported or submitted locally

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    License

    • If not noted otherwise all contents are available under Attribution 4.0 International (CC BY 4.0)

    Credits

    • logo EU
    • This project received funding from the European Union's Horizon 2020 research and innovation programme under grant agreement No 683680, 810640, 871069 and 964352.

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