Refraktive Multifokusröntgenlinsen und Hartmann-Shack-Sensoren

Abstract

Compound refractive X-ray lenses (CRLs) have an absorption-limited numerical aperture. In this work, an array of CRLs with slightly inclined optical axes is used to circumvent this limitation in full-field microscopy at laboratory sources. Among other things, fabrication of CRLs via deep X-ray lithography and parallel fields of CRLs (Shack-Hartmann wavefront sensor, scanning imaging methods) are discussed.